Grafting a homogeneous transition metal catalyst onto a silicon AFM probe: a promising strategy for chemically constructive nanolithography

Dmitry A. Valyaev (1) , Sylvain Clair (2) , Lionel Patrone (2) , Mathieu Abel (2) , Louis Porte (2) , Olivier Chuzel (1) , Jean-Luc Parrain (1)

1 STeRéO
2 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

We report a novel approach to chemically selective lithography using an atomic force microscope (AFM) probe with immobilized homogeneous catalyst, potentially giving access to diverse nanoscale transformations of the surface-bound functional groups. This new concept was proven for the local epoxidation of an alkene-terminated self-assembled monolayer on silicon using H2O2 as an oxidant and a catalytic silicon AFM tip charged with manganese complexes with 1,3,7-triazacyclononane type ligands.

Mots clés: 7-triazacyclononane complexes; manganese 1; alkene epoxidation; atomic force microscopy; homogeneous supported catalysis; scanning probe nanolithography

Domaines: Chimie organique

Dmitry A. Valyaev, Sylvain Clair, Lionel Patrone, Mathieu Abel, Louis Porte, et al.. Grafting a homogeneous transition metal catalyst onto a silicon AFM probe: a promising strategy for chemically constructive nanolithography. Chemical Science, 2013, 4, pp.2815-2821. ⟨10.1039/c3sc50979f⟩. ⟨hal-00861617⟩