Piezoelectric tantalum pentoxide studied for optical tunable applications

Rémy Parmentier (1) , Fabien Lemarchand (1) , Michel Cathelinaud (1) , Michel Lequime (1) , Claude Amra (2) , Stéphane Labat (3) , S. Bozzo (4) , Franck Bocquet (3) , Ahmed Charaï (4) , Olivier Thomas (4) , Christian Dominici

1 RCMO - RCMO
2 MAP2
3 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
4 TECSEN - Laboratoire de thermodynamique, propriétés électriques, contraintes, structures aux échelles nanométriques

Piezoelectric transparent thin films are of great interest for use in tunable filters. We present experimental results on Ta2O5 single layers coated on fused-silica substrates with an electron-beam deposition process. Above 450 °C, coatings change from an amorphous to a polycrystallized structure. When this structure shows a preferred orientation matching the piezoelectric tensor of the Ta2O5 crystal and the external electric field, variation in the piezoelectric layer thickness is expected. We detail experimental results in terms of optical (spectrophotometric and scattering measurements) and nonoptical characterizations (x-ray diffraction and scanning electron microscopy). Then the resultant thickness variation under oscillating applied voltage is measured with an extrinsic Fabry-Perot interferometer setup.

Domaines: Optique / photonique; Electromagnétisme; Optique [physics.optics]

Rémy Parmentier, Fabien Lemarchand, Michel Cathelinaud, Michel Lequime, Claude Amra, et al.. Piezoelectric tantalum pentoxide studied for optical tunable applications. Applied optics, 2002, 41 (16), pp.3270-3276. ⟨10.1364/AO.41.003270⟩. ⟨hal-01324143⟩