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Reactive sputtering deposition of perovskite LaTiOxNy films using a stoichiometric oxynitride LaTiO2N target

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https://hal.archives-ouvertes.fr/hal-00567554
Contributor : Laurent Le Gendre Connect in order to contact the contributor
Submitted on : Monday, February 21, 2011 - 2:29:15 PM
Last modification on : Wednesday, April 27, 2022 - 4:07:04 AM

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  • HAL Id : hal-00567554, version 1

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Claire Le Paven-Thivet, Ratiba Benzerga, Yu Lu, Ahmed Ziani, Laurent Le Gendre, et al.. Reactive sputtering deposition of perovskite LaTiOxNy films using a stoichiometric oxynitride LaTiO2N target. 9th International Conference on Reactive Sputtering Deposition 2010, Dec 2010, Ghent, Belgium. ⟨hal-00567554⟩

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