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Dielectric oxynitride laTiOxNy thin films

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https://hal.archives-ouvertes.fr/hal-00606922
Contributor : Laurent Le Gendre Connect in order to contact the contributor
Submitted on : Thursday, July 7, 2011 - 2:11:12 PM
Last modification on : Tuesday, December 6, 2022 - 12:42:14 PM

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  • HAL Id : hal-00606922, version 1

Citation

Viet Hung Nguyen, Ahmed Ziani, Ratiba Benzerga, Claire Le Paven-Thivet, Didier Fasquelle, et al.. Dielectric oxynitride laTiOxNy thin films. European Materials Research Society - Spring Meeting 2011, May 2011, Nice, France. ⟨hal-00606922⟩

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