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Dielectric LaTiOxNy oxynitride thin films

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Contributor : Laurent Le Gendre Connect in order to contact the contributor
Submitted on : Thursday, July 7, 2011 - 2:59:39 PM
Last modification on : Tuesday, November 22, 2022 - 2:26:16 PM


  • HAL Id : hal-00606947, version 1


Viet Hung Nguyen, Ahmed Ziani, Ratiba Benzerga, Claire Le Paven-Thivet, Didier Fasquelle, et al.. Dielectric LaTiOxNy oxynitride thin films. 1ST WORKSHOP NIMS-UR1 ON "MATERIALS AND SUSTAINABLE DEVELOPMENT: ISSUES AND CHALLENGES OF THE 21ST CENTURY", May 2011, Rennes, France. ⟨hal-00606947⟩



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