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Reactive sputtering deposition of perovkite LaTiOxNy films using a stoechimetric oxynitride LaTiOxNy target

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https://hal.archives-ouvertes.fr/hal-00606953
Contributor : Laurent Le Gendre Connect in order to contact the contributor
Submitted on : Thursday, July 7, 2011 - 3:12:07 PM
Last modification on : Monday, January 24, 2022 - 12:16:29 PM

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  • HAL Id : hal-00606953, version 1

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Claire Le Paven-Thivet, Ratiba Benzerga, Yu Lu, Ahmed Ziani, Laurent Le Gendre, et al.. Reactive sputtering deposition of perovkite LaTiOxNy films using a stoechimetric oxynitride LaTiOxNy target. 1ST WORKSHOP NIMS-UR1 ON "MATERIALS AND SUSTAINABLE DEVELOPMENT: ISSUES AND CHALLENGES OF THE 21ST CENTURY", May 2011, Rennes, France. ⟨hal-00606953⟩

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