Skip to Main content Skip to Navigation
New interface
Journal articles

Influence of the sputtering reactive gas on the oxide and oxynitride LaTiON deposition by RF magnetron sputtering

Abstract : Perovskite La Ti O N thin films have been grown by radio frequency magnetron sputtering from a LaTiO2N target. With a very low base pressure in the deposition chamber, two types of films can be obtained: colored oxynitride LaTiO2N films when nitrogen gas is introduced during sputtering or black N-doped LaTiO3 films when deposition is performed in pure argon. On SrTiO3 (0 0 1) substrate heated at 750 ◦C, LaTiO2N films are epitaxially grown, while N:LaTiO3 films are poorly crystallized. With a higher base pressure in the deposition chamber, transparent La2Ti2O7 films are produced. They are (0 1 2) textured on (0 0 1) SrTiO3 substrate. As observed during the reactive sputtering of metallic targets, the evolution of the deposition rate and the nitrogen content in films according to the N2 percentage in the plasma is abrupt.
Document type :
Journal articles
Complete list of metadata

https://hal.archives-ouvertes.fr/hal-00786428
Contributor : Ratiba Benzerga Connect in order to contact the contributor
Submitted on : Friday, February 8, 2013 - 3:39:51 PM
Last modification on : Wednesday, April 27, 2022 - 4:12:39 AM

Identifiers

Citation

Yu Lu, Claire Le Paven-Thivet, Ratiba Benzerga, Laurent Le Gendre, Ala Sharaiha, et al.. Influence of the sputtering reactive gas on the oxide and oxynitride LaTiON deposition by RF magnetron sputtering. Applied Surface Science, 2013, 264, pp.533-537. ⟨10.1016/j.apsusc.2012.10.059⟩. ⟨hal-00786428⟩

Share

Metrics

Record views

127