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(Sr,La)-(Ta,Ti)-O-N perovskite oxide and oxynitride films: influence of the deposition and annealing conditions on the structure and electrical properties

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https://hal.archives-ouvertes.fr/hal-02134839
Contributor : Ratiba Benzerga Connect in order to contact the contributor
Submitted on : Monday, May 20, 2019 - 5:28:44 PM
Last modification on : Wednesday, April 27, 2022 - 4:05:25 AM

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  • HAL Id : hal-02134839, version 1

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Laurent Le Gendre, Claire Le Paven, Mohamad Haydoura, Ratiba Benzerga, Florent Marlec, et al.. (Sr,La)-(Ta,Ti)-O-N perovskite oxide and oxynitride films: influence of the deposition and annealing conditions on the structure and electrical properties. 10th International Symposium on NiTrides (ISNT 2019), Jun 2019, Barcelone, Spain. ⟨hal-02134839⟩

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