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Nanoribbons Micro-résonateurs Low-frequency noise PECVD Field effect transistors Silicon nanowires Thin film transistors Inkjet printing Microcapteur Sensor Doping Photoluminescence Synthesis Resistors ICP-CVD Basse température Integrated optics Electrical stability Organic-inorganic hybrid composites PH Photonics Gas sensor Polymer Sensors Integrated photonics Flexible electronics Active layer Low temperature Photonic Nano-inscribed slots Microcapteurs Chalcogenide Low temperatures Flexible substrate Microelectronics Nanofils Cluster compounds Nanofils de silicium SLS process Thin films Microresonators LPCVD Microcrystalline silicon Reproducibilities Silicium microcristallin Low temperature electronics Procédé SLS Photonique intégrée Carbon nanotubes Polymers Mid-IR Organic electronics Sensitivity Plasma etching Nanowires Polycrystalline silicon CMOS integrated circuits Chemical sensors CMOS compatible Deep UV polymer Méthode des espaceurs Diazonium salts Temperature Microsensors Fonctionnalisation de surface Microfluidic Titanium nitride Thin Film Transistors Chemical detection Silicon Electrodes Organic semiconductor Organic field effect transistor Μ-Si doped Deep UV210 polymer Microfluidique Amorphous materials Photodetector Polysilicon Organic field effect transistors Silicium Deformation In-situ doping Resonators Organic semiconductors Micro-resonators Bridged cyclo-oligophenylenes Low-cost silicon nanowires devices Fatty acid Density of states Infrared Gel/fluid phase transition Organic electronic devices Electrical performance Polycrystalline materials Resistor Chemical sensor Copper Functionalization Couches minces