Thin film depth profiling using simultaneous particle backscattering and nuclear resonance profiling

N. P. Barradas , R. Mateus , M. Fonseca , M. A. Reis , K. Lorenz , Ian Vickridge (1)

1 INSP - Institut des Nanosciences de Paris

We report an important extension to the DataFurnace code for Ion Beam Analysis which allows users to simultaneously and self-consistently analyse Rutherford (RBS) or non-Rutherford (EBS) elastic backscattering together with particle-induced gamma-ray (PIGE) spectra. We show that the code works correctly with a well-known sample. Previously it has not been feasible to self-consistently treat PIGE and RBS/EBS data to extract the depth profiles. The PIGE data can be supplied to the code in the usual way as counts versus beam energy, but the differential cross-sections for the PIGE reaction are required. We also compared the results obtained by the new routine with high resolution narrow resonance profiling (NRP) simulations obtained with the stochastic model of energy loss. (C) 2010 Elsevier B.V. All rights reserved.

Mots clés: PIGE; NRP; RBS; NDF

Domaines: Matière Condensée [cond-mat]

N. P. Barradas, R. Mateus, M. Fonseca, M. A. Reis, K. Lorenz, et al.. Thin film depth profiling using simultaneous particle backscattering and nuclear resonance profiling. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2010, 268 (11-12), pp.1829-1832. ⟨10.1016/j.nimb.2010.02.092⟩. ⟨hal-01237486⟩