LIGA technique application in micro-optics

Skandar Basrour (1) , S. Ballandras (1) , D. Hauden (1)

1 Laboratoire de Physique et Métrologie des Oscillateurs

The LIGA technique (German acronym for lithographie, galvanoformung, abformung) is a powerful tool for mass production of high aspect ratio microstructures and microsystems. The materials used in this process are metals, polymers and also ceramics. For these reasons, the LIGA can be complementary of other micromachining processes. In this paper, we report the different steps of this technique, its applications in micro-optics and its later evolutions.

Mots clés: LIGA-technique; high-aspect-ratio-microstructures; high-aspect-ratio-microsystems

Domaines: Micro et nanotechnologies/Microélectronique

Skandar Basrour, S. Ballandras, D. Hauden. LIGA technique application in micro-optics. Annales de Physique, 1995, Vol.20, Issue 5-6, pp.693-700. ⟨hal-00008925⟩