Formation of palladium and titanium silicides by rapid thermal annealing

D. Levy (1) , J.P. Ponpon (1) , A. Grob (1) , J.J. Grob (1) , P. Siffert (1)

1 IReS - Institut de Recherches Subatomiques

D. Levy, J.P. Ponpon, A. Grob, J.J. Grob, P. Siffert. Formation of palladium and titanium silicides by rapid thermal annealing. Physica B: Condensed Matter, 1985, 129, pp.205. ⟨in2p3-00006488⟩